期刊
CHEMISTRY-A EUROPEAN JOURNAL
卷 12, 期 30, 页码 7942-7947出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/chem.200600032
关键词
electrochemistry; etching; metal ions; semiconductors; silicon nanowires
A straightforward metal-particle-induced, highly localized site-specific corrosion-like mechanism was proposed for the formation of aligned silicon-nanowire arrays on silicon in aqueous HF/AgNO3 solution on the basis of convincing experimental results. The etching process features weak dependence on the doping of the silicon wafers and, thus, provides an efficient method to prepare silicon nanowires with desirable doping characteristics. The novel electrochemical properties between silicon and active noble metals should be useful for preparing novel silicon nanostructures and also new optoelectronic devices.
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