The authors investigated thermal conductivity (K) in nanocrystalline diamond (NCD) films on silicon using the 3 omega and laser flash techniques. The K temperature dependence has been studied for the undoped and nitrogen-doped NCD films for T=80-400 K and compared with that in microcrystalline diamond (MCD) films. The effects of phonon scattering from the grain boundaries and film interfaces on thermal conduction have been studied using three different models. For NCD the room temperature K is 0.1-0.16 W/cm K and decreases with nitrogen doping. The K temperature dependence in NCD is different from that in MCD films and can be adequately described by the phonon-hopping model. (c) 2006 American Institute of Physics.
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