期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 118, 期 1-2, 页码 110-114出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2006.04.006
关键词
tin dioxide; molecular beam epitaxy
A comparative study of the gas sensing properties between mono- and poly-crystalline tin dioxide thin films has been carried out. SnO2 films of thickness range 30-100nm were deposited on r-axis sapphire substrate in temperature range 260-550 degrees C using the molecular beam epitaxy (MBE) technique. The crystalline structure of the resulting films was examined by using in situ high energy electron diffraction (RHEED), X-ray diffraction (XRD) and atomic force microscopy (AFM). The electrical properties of the films were characterized by using a Hall effect measurement system. Sensitivity towards different gases was tested and a comparison between mono- and poly-crystalline films is presented. Monocrystalline films were found to exhibit greater potential for continuous gas detection. (c) 2006 Elsevier B.V. All rights reserved.
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