期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 118, 期 1-2, 页码 198-203出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2006.04.022
关键词
metal-oxide; gas nanosensors; FIB
A procedure to contact single metal-oxide nanowires and nanoparticles of different materials using a Dual Beam FIB has been developed. The quality of the electrical contacts has been evaluated and the possibility of extracting the electrical parameters of these nanowires and nanoparticles demonstrated. The response of some of them to different gases is presented, proving the feasibility of fabricating metal-oxide nanosensors. (c) 2006 Elsevier B.V. All rights reserved.
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