期刊
OPTICS EXPRESS
卷 14, 期 22, 页码 10228-10232出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.14.010228
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We use the soft lithography technique to fabricate a polymeric waveguide Bragg grating filter. Master grating structure is patterned by e-beam lithography. Using an elastomeric stamp and capillary action, uniform grating structures with very thin residual layers are transferred to the UV curable polymer without the use of an imprint machine. The waveguide layer based on BCB optical polymer is fabricated by conventional optical lithography. This approach provides processing simplicity to fabricate Bragg grating filters. (c) 2006 Optical Society of America
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