3-omega measurements of vertically oriented carbon nanotubes on silicon

An exploratory thermal interface structure, made of vertically oriented carbon nonotubes directly grown on a silicon substrate, has been thermally characterized using a 3-omega method. The effective thermal conductivities of the carbon nanotubes (CNT) sample, including the effects of voids, are found to be 74 W/m K to 83 W/m K in the temperature range of 295 K to 323 K, one order higher than that of the best thermal greases or phase change materials. This result suggests that the vertically), oriented CNTs potentially can be a promising next-generation thermal interface solution. Howevei; fairly large thermal resistances were observed at the interfaces between the CNT samples and the experimental contact. Minimizing these contact resistances is critical for the application of these materials.