期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 16, 期 11, 页码 N23-N27出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/16/11/N02
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A new fabrication technique based on etching is employed to convert a copper foil into a porous structure with an array of micron size pores. The motivation stems from the need to develop a more efficient and controllable gas diffusion medium for fuel cell applications. The influence of mask shape, mask width and etching time was investigated experimentally. A correlation to predict trench width with etching time was derived; normalizing by mask width allows one to collapse the data. The etching rates to obtain micro-scale features, which are of the order of 1-2 mu m min(-1), are mainly dominated by the mask width due to mass-transport resistance. It is possible to control the pore dimensions, porosity and pore size distributions with this technique.
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