Modelling and fabrication of low operation temperature microcages with a polymer/metal/DLC trilayer structure

Multi-finger microcages with metal/diamond like carbon (DLC) bilayer and polymer/metal/DLC trilayer structures were analyzed, simulated and fabricated. Modelling by finite element analysis showed that a soft polymer can be used together with DLC to form a normally closed microcage which can be opened by 90 degrees angle at a temperature of similar to 400 K, which is much lower than that of a metal/DLC bilayer structure previously demonstrated. The opening temperature for a microcage is independent of the finger dimensions, but is simply determined by the thermal expansion coefficient difference of two materials used. Microcages with SU8/DLC bilayer and SU8/Al/DLC trilayer structures have been fabricated and fully closed microcages with diameters of similar to 40 mu m have been obtained. Initial electrical tests have showed these devices open by more than 90 degrees at a temperature lower than 150 degrees C, roughly in agreement with the theoretical analysis. (c) 2006 Elsevier B.V. All rights reserved.