4.6 Article

Continuous ultraviolet roll nanoimprinting process for replicating large-scale nano- and micropatterns

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APPLIED PHYSICS LETTERS
卷 89, 期 21, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.2392960

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With the increasing demand for large-scale nano- and micropatterns in the field of digital displays, nano- and micropattern replication technology has become a research priority. In this study, a continuous ultraviolet (UV) roll nanoimprinting process using a pattern roll stamper for the replication of large-scale nano- and micropatterns was designed and constructed. Several flexible nano- and micropatterns with large areas were fabricated and analyzed as tests of this continuous UV imprinting process. (c) 2006 American Institute of Physics.

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