4.4 Article

Quantum confinement effects in silicon nanocrystals produced by laser-induced etching and cw laser annealing

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SEMICONDUCTOR SCIENCE AND TECHNOLOGY
卷 21, 期 12, 页码 1627-1632

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IOP PUBLISHING LTD
DOI: 10.1088/0268-1242/21/12/021

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A comparative study of quantum confinement of electrons and phonons in silicon nanocrystals produced by laser-induced etching on a silicon ( Si) substrate and continuous wave ( cw) laser-induced crystallization in a-Si: H film on a quartz substrate is presented here. Raman line shapes of optical phonons confined in Si nanocrystals were utilized using a phenomenological phonon-confinement model. It is appropriately modified by incorporating a Gaussian distribution of sizes for two-dimensional ( columnar) and three-dimensional ( spherical) confinement parameters for laser-induced etching and cw laser-induced crystallization processes, respectively. The calculated mean crystallite sizes were in consonance with those calculated from the bond-polarizability model. Confinement effects were found to be more prominent in Si nanocrystals prepared by laser-induced crystallization in comparison to laser-etched Si. Photoluminescence spectra of both the samples were also utilized to study the dimensionality aspect of nanocrystals.

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