期刊
MICROSCOPY AND MICROANALYSIS
卷 12, 期 6, 页码 515-526出版社
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927606060703
关键词
spherical-aberration corrector (C-s-corrector); probe formation; spatial resolution; minimum mass fraction; minimum detectable mass; quantitative thin-film X-ray analysis; xi(zeta)-factor method; grain-boundary segregation
A Nion spherical-aberration (Cs) corrector was recently installed on Lehigh University's 300-keV cold field-emission gun (FEG) Vacuum Generators HB 603 dedicated scanning transmission electron microscope (STEM), optimized for X-ray analysis of thin specimens. In this article, the impact of the Cs-corrector on X-ray analysis is theoretically evaluated, in compared with initial experimental results. Finally, the possibilities of atomic-column X-ray analysis in a Cs-corrected STEM are discussed.
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