期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 15, 期 6, 页码 1477-1482出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2006.879681
关键词
microfluidic; neural probes; parylene; thermal bonding
This paper describes the fabrication technology and characterization of Parylene neural probes containing fluidic channels for delivery of small amounts of drugs into biological tissue as well as neural recording. We present a first attempt to realize such neural probes by micromolding and thermal bonding of Parylene. Compared to the common fabrication method, where a sacrificial photoresist layer is sandwiched between two Parylene layers, the major advantages of this process are, that the time consuming photoresist dissolution is omitted, and that the adhesion between the Parylene layers could be improved. The electrodes were characterized by impedance measurements, in which an impedance sufficiently low for neural recording was observed. Fluidic injection experiments with the microchannel have shown that nanoliter volumes can be injected.
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