期刊
PLASMA PROCESSES AND POLYMERS
卷 4, 期 1, 页码 27-40出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.200600070
关键词
acetylene; inductively coupled plasmas; modeling; nanofabrication; plasma-enhanced chemical vapor deposition (PECVD); synthesis
The results of two-dimensional fluid simulation of number densities and fluxes of the main building blocks and surface preparation species involved in nanoassembly of carbon-based nanopatterns in Ar+H-2+C2H2 reactive plasmas are reported. It is shown that the process parameters and non-uniformity of surface fluxes of each particular species may affect the targeted nanopattern quality. The results can be used to improve predictability of plasma-aided nanofabrication processes and optimize the parameters of plasma nanotools.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据