期刊
THIN SOLID FILMS
卷 515, 期 6, 页码 3196-3201出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2006.01.035
关键词
diamond-like carbon; indentation; scratching; focused ion beam microscopy; fracture toughness
A diamond-like carbon thin film was coated onto a stainless steel substrate using plasma assisted chemical vapour deposition (PACVD). Instrumented indentation and scratching were used, supported by focused ion beam (FIB) microscopy, to explore deformation and fracture behaviours of this coating system. The formation and growth of ring and radial cracks in the coating, as well as plastic flow in the ductile substrate, were observed to be the predominant deformation processes for this coating system. Lateral cracking occurred at the interface of the coating/substrate following indentation, but in the middle of the coating following scratching. No evidence of plastic flow within the coating was observed. Coating deformation is, therefore, controlled by its fracture energy. An indentation-energy-based model was applied to evaluate the fracture toughness of the coating. (c) 2006 Elsevier B.V. All rights reserved.
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