Reduction in feature size of two-photon polymerization using SCR500

Fabricated by femtosecond laser pulses at wavelength lambda of 780 nm, the feature size of two-photon polymerization using SCR500 was reduced to lambda/50. Lines with sub-25-nm width were produced by controlling the incident laser power and the laser focus scan speed up to 700 mu m/s. Based on repolymerization between two structures close to each other, the feature size was further reduced to similar to 15 nm, which demonstrated the potential for three-dimensional nanofabrication with high spatial resolution. (c) 2007 American Institute of Physics.