期刊
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
卷 53, 期 5, 页码 1266-1269出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/anie.201309474
关键词
2D nanomaterials; chemical vapor deposition; molybdenum disulfide; patterned growth; surface alloys
资金
- National Research Foundation of Korea (NRF) [2010-00285, 2012R1A2A1A01003040, 2009-0094036]
- NRF [2012H1A2A1016525]
- National Research Foundation of Korea [2012R1A2A1A01003040, 2012H1A2A1016525, 2010-00285] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
A novel way to grow MoS2 on a large scale with uniformity and in desired patterns is developed. We use Au film as a catalyst on which [Mo(CO)(6)] vapor decomposes to form a Mo-Au surface alloy that is an ideal Mo reservoir for the growth of atomic layers of MoS2. Upon exposure to H2S, this surface alloy transforms into a few layers of MoS2, which can be isolated and transferred on an arbitrary substrate. By simply patterning Au catalyst film by conventional lithographic techniques, MoS2 atomic layers in desired patterns can be fabricated.
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