期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 134, 期 1, 页码 2-10出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2006.05.009
关键词
injection molding; MEMS; polymer; investment casting; micromolding; microneedle
Polymer investment molding combines traditional injection molding with investment casting to create hollow parts on the microscale. Silicon mold inserts are manufactured using reactive ion etching or anisotropic wet etching. Then, a sacrificial element is placed in the mold. Plastic is injected into the mold and around the sacrificial element using an injection molding press. After removing the plastic part from the mold, liquid etchant dissolves the sacrificial element leaving a hollow plastic part. To demonstrate the process microneedles were formed by injection molding Cyclic Olefin Copolymer (Ticona Topas (R)) around 32 mu m diameter aluminum bond wire. Hollow, in-plane, microneedles were then achieved by dissolving the bond wire away in liquid aluminum etchant. Rectangular cross-section needles were created with dimensions of 130 mu m x 100 mu m, overall lengths of 280 mu m, and approximate inner diameter of 35 mu m. Tapered needles were also created having an approximately triangular cross-section with two 105 mu m sides and one 150 mu m side. These needles had a base-to-tip length of 300 mu m and approximate inner diameter of 35 mu m. (c) 2006 Elsevier B.V. All rights reserved.
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