Novel readout electronics for thickness shear-mode liquid sensors compensating for spurious conductivity and capacitances

In this paper, a readout circuit for a thickness shear-mode (TSM) resonator is presented which can be used for sensing applications in liquids such as viscosity sensing. The system features compensation of both spurious capacitances and conductances in parallel to the resonator. This allows measurements even in conductive liquids Without the need for an elaborate sealing of the sensor. The influence of the spurious elements is determined by means of two orthogonal synchronous detectors and eliminated by active compensation using voltage-controlled amplifiers (VCAs). Furthermore, the circuit is robust against possible phase errors. The basic concept is discussed in detail, and a readout circuit is developed. A prototype is presented, and sample results are given, demonstrating the feasibility of the approach.