期刊
IEEE SENSORS JOURNAL
卷 7, 期 3-4, 页码 336-341出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2006.890140
关键词
gas sensor; love wave; zero TCF structure; ZnO
Love wave structures are encouraging devices for sensing applications in gaseous or liquid media because of their high sensitivity. In this paper, we first investigate basic properties of a ZnO/quartz Love wave device by the use of theoretical considerations in order to get a good gas sensor. Second, experimental results of the developed structure, ZnO(2.1 mu m)/90 degrees ST-cut quartz, confirm the suitable characteristics, including temperature compensation, high electromechanical coupling coefficient, and good sensitivity to mass loading effect. We finally characterize the gas effect on the photoresist Shipley S1805 with the above structure, and thus we confirm our approach.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据