Transmission resonant filters in a waveguide with vertical gratings have been realized in silicon on insulator wafers. Experimental studies of fabricated devices show a broad stopband of similar to 19 nm in the center of which exists a narrow transmission band of similar to 0.5 nm with a quality factor of similar to 3000. These resonant cavities are useful for laser cavities, switches, modulators, detectors, and tunable filters. (c) 2007 Optical Society of America.
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