期刊
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
卷 13, 期 2, 页码 228-234出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2007.893112
关键词
electrothermal actuation; large vertical displacement (LVD); microactuators; microelectromechanical systems (MEMS); optical confocal microscopy; optical scanners
This paper reports a microendoscopic confocal imaging probe based on a large-vertical-displacement (LVD) microlens scanner. Photoresist reflow technique is used to form a microlens on a lens holder that is integrated with a LVD microactuator. With a footprint of 3 mm x 2 mm, the LVD microlens scanner can vertically displace the integrated polymer microlens by 0.7 mm at a dc voltage of 23 V. The LVD microlens chip is directly packaged into a 5-mm-diameter imaging probe. The architecture of the imaging probe is very simple and is just composed of this microlens, a GRIN rod lens (Phi 1.8 mm), a metal mold, and a cover.
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