期刊
JOURNAL OF MATERIALS SCIENCE
卷 42, 期 6, 页码 1931-1941出版社
SPRINGER
DOI: 10.1007/s10853-006-0174-9
关键词
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The pulsed laser deposition technique was applied to deposit nitrogen-doped yttria stabilized zirconia (YSZ) thin films. The working parameters were varied in order to achieve a maximal nitrogen content. The films were characterized by SIMS, XPS, X-ray diffraction and optical spectroscopy. The surface topography was studied by AFM and HRSEM. The influence of the deposition parameters on the film properties is discussed.
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