期刊
出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.msea.2006.02.317
关键词
hydrous layer; anodization; dielectric layer; RBS; boehmite
A hydrous oxide film for the application as dielectric film is synthesized by immersion of pure aluminum in hot water. From a Rutherford backscattering analysis, the ratio of aluminum to oxygen atoms was found to be 3:2 in the anodized aluminum oxide film, and 2:1 in the hydrous oxide layer. Anodization of the hydrous oxide layer was more effective for the transition of amorphous anodic oxides to the crystalline aluminum oxides. (c) 2006 Elsevier B.V. All rights reserved.
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