4.6 Article

X-ray photoemission study of CoFeB/MgO thin film bilayers

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APPLIED PHYSICS LETTERS
卷 90, 期 13, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.2717091

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The authors present results from an x-ray photoemission spectroscopy study of CoFeB/MgO bilayers where they observe process-dependent formation of B, Fe, and Co oxides at the CoFeB/MgO interface due to oxidation of CoFeB during MgO deposition. Vacuum annealing reduces the Co and Fe oxides but further incorporates B into the MgO forming a composite MgBxOy layer. Inserting an Mg layer between CoFeB and MgO introduces an oxygen sink, providing increased control over B content in the barrier. (c) 2007 American Institute of Physics.

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