期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 135, 期 1, 页码 126-130出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2006.06.056
关键词
eddy current sensor; coils array; flexible substrate; displacement measurement; time division multiplexing
This paper presents a new flexible eddy current sensor array and its measurement system that used for conformable proximity sensing, for instance, the gap between curved surfaces. The sensor probe, designed to consist of a forked coils array and a long flat cable, is manufactured on a thin flexible substrate by the flexible printed circuit board (FPCB) technology. The probe is very thin and flexible, so that it can conform to the surface geometries of the measured objects. Time division multiplexing (TDM) technology has been introduced to scan and sample all the sensing elements. Some reforms are also implemented to the conventional LC oscillator to solve the problem of the coils having a low Q-factor. Experimental results show that, to a steel target, the measurement accuracy of the sensor system can reach +/- 0.5% for a 2mm full scale. The practice for real-time inspection of the small gaps between large curved surfaces is also considered. (C) 2006 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据