4.5 Article

On the Vacuum Ultraviolet Radiation of a Miniaturized Non-thermal Atmospheric Pressure Plasma Jet

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PLASMA PROCESSES AND POLYMERS
卷 4, 期 -, 页码 S460-S464

出版社

WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.200731207

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atmospheric pressure glow discharges (APGD); microdischarges; non-thermal plasma; plasma jet; plasma treatment; surface modification; UV spectroscopy

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The suitability of a miniaturized non-thermal APPJ operating with Ar at ambient atmosphere for applications related to surface treatment is demonstrated. The VUV emission is measured and the dependence of selected line intensities over the radius of the plasma jet is presented. The Ar discharge is characterized by an intense VUV radiation, attributed to N, H, and O atomic lines along with an Ar-2* excimer continuum, which is drastically reduced after adding up to 5% N-2 to the Ar working gas. Two absorption dips are found in the VUV spectrum. The surface energy enhancement of substrates at temperatures as low as 35 degrees C along with chemical reactivity originating from abundant NO and OH free radicals and UV/VUV radiation in the plasma give rise to numerous applications, e. g., in the medical and biological field.

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