期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
卷 46, 期 4A, 页码 1653-1655出版社
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.46.1653
关键词
liquid phase deposition; niobium doping; nanocrystallite; titanium oxide; oxygen sensor
Niobium-doped amorphous titanium oxide film can be deposited on a Corning glass substrate using a mixture of ammonium hexafluorotitanate, boric acid, niobium oxide and ammonium hydrogen fluoride aqueous solutions. After thermal annealing, the nanocrystallite niobium-doped titanium oxide film can be obtained. The smaller crystallite size of nanocrystal lite niobium-doped titanium oxide than that of undoped-titanium oxide benefits the catalytic activity for sensing gas. A thin-film niobium-doped titanium oxide oxygen sensor with a higher sensitivity and a faster response is demonstrated.
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