期刊
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
卷 47, 期 30, 页码 5524-5542出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/anie.200703238
关键词
lithography; macroelectronics; microfabrication; nanostructures; wavy silicon