Direct Fabrication of 3D Periodic Inorganic Microstructures using Conformal Phase Masks

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

WILEY-V C H VERLAG GMBH

1. US Army Research Office [DAAD19-031-0227]
2. US Department of Energy, Division of Materials Sciences [DEFG02-07ER46471]
3. US Department of Energy [DE-FG02-07ER46453, DE-FG02-07ER46471]