期刊
IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT
卷 56, 期 2, 页码 392-396出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIM.2007.890593
关键词
magnetic field effects; nanotechnology; superconducting devices; thin films
As metrology extends toward the nanoscale, a number of potential applications and new challenges arise. By combining photolithography with focused ion beam and/or electron beam methods, superconducting quantum interference devices (SQUIDs) with loop dimensions down to 200 nm and superconducting bridge dimensions of the order 80 nm have been produced. These SQUIDs have a range of potential applications. As an illustration, we describe a method for characterizing the effective area and the magnetic penetration depth of a structured superconducting thin film in the extreme limit, where the superconducting penetration depth lambda is much greater than the film thickness and is comparable with the lateral dimensions of the device.
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