期刊
DIAMOND AND RELATED MATERIALS
卷 16, 期 4-7, 页码 675-678出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2006.11.074
关键词
nano-crystalline diamond film; plasma CVD; optical emission; QMS
Nano-crystalline diamond (NCD) thin film with grains of about 5-100 nm in size attracts much attention as new functional materials in various industrial fields, due to its unique properties that are different from the conventional microcrystalline diamond (MCD) thin film. Most commonly, NCD film can be synthesized using CH4/Ar plasma with/without a small amount of hydrogen gas added. In this study, we carried out the measurements of quadrupole mass spectroscopy (QMS) and optical emission spectroscopy (OES) to investigate CH4/H-2/Ar mixture plasma in detail. Combined with our experimental results of NCD film synthesis, the mechanism of CH4 dissociation and the precursors of NCD were further explored. (C) 2006 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据