期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
卷 46, 期 4B, 页码 2771-2774出版社
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.46.2771
关键词
electroplating; quartz bonding; nanopillars; DNA electrophoresis
We fabricated two different distributions of nanopillars-tilted and square distributions. There are difficulties in fabricating a chip containing these nanopillars, particularly in Ni plating, and quartz bonding. We improved the Ni plating by applying stable electric current and the reliability of the quartz bonding. In nanopillars with a square distribution, DNA showed conformational changes, and did not show any reptile motion, but moved in a straight line in contrast with its behavior in nanopillars with a tilted distribution. Nanopillars with a tilted distribution acted effectively as sieves for DNA separation by size.
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