Precision grinding of microarray lens molding die with 4-axes controlled microwheel

This paper deals with precision grinding of microarray lens (fly eye) molding die by using a resinoid bonded diamond wheel. An ultra-precision grinding system of microarray lens molding die and new truing method of resinoid bonded diamond wheel were developed. In this system, a grinding wheel was four-dimensionally controlled with 1 nm resolution by linear scale feedback system and scanned on the workpiece surface. New truing method by using a vanadium alloy tool was developed and its performance was obtained with high preciseness and low wheel wear. Finally, the microarray lens molding dies of fine grain tungsten carbide (WC) was tested with the resinoid bonded diamond wheel to evaluate grinding performance. (C) 2007 Published by NIMS and Elsevier Ltd.