A novel two-stage backpressure-independent micropump: modeling and characterization

A novel design of a piezoelectric silicon micropump is proposed, which provides a constant flow rate over a wide backpressure range of up to 30 kPa. This highly appreciable feature is based on a new serial arrangement of two active valves and relies on both an appropriate electrical actuation sequence of the piezo-actuators and an immanent limitation of the membrane deflection by the valve seats. The design is optimized for the low flow regime ranging from 0.1 to 50 mu l min(-1). A detailed lumped-parameter model is derived in order to reveal the physics behind this pumping principle and to identify the optimum control scheme. For the fabrication of our device, a comparably simple and robust 2-wafer process is utilized. A thorough experimental investigation demonstrates the high performance of the micropump. The backpressure independence of the flow rate enables high-resolution volumetric dosing within the aforementioned flow range. The stroke volume and hence the resolution of the micropump is adjustable via the upstroke voltage of the actuator between 50 and 200 nl. Depending on this setting typical actuation frequencies range from 0.05 to 5 Hz and the flow rate scales proportional to the frequency within that frequency range.