Non-linear vibrations and frequency response analysis of piezoelectrically driven microcantilevers

Microcantilevers have recently received widespread attentions due to their extreme applicability and versatility in both biological and non-biological applications. Along this line, this paper undertakes the non-linear vibrations of a piezoelectrically driven microcantilever beam as a common configuration in many scanning probe microscopy and nanomechanical cantilever biosensor systems. A part of the microcantilever beam surface is covered by a piezoelectric layer (typically ZrO) which acts both as an actuator and sensor. The bending vibrations of the microcantilever beam are studied considering the inextensibility condition and the coupling between electrical and mechanical properties in the piezoelectric materials. The non-linear terms appear in the form of quadratic expression due to presence of piezoelectric layer, and cubic form due to geometrical non-linearities. The Galerkin approximation is then utilized to discretize the equations of motion. In addition, the method of multiple scales is applied to arrive at the closed form solution for the fundamental natural frequency of the system. An experimental setup consisting of a commercial piezoelectric microcantilever attached on the stand of a state-of-the-art microsystem analyzer for non-contact vibration measurement is utilized to verify the theoretical developments. It is found that the experimental results and theoretical findings are in good agreement, which demonstrates that the non-linear modeling framework could provide a better dynamic representation of the microcantilever than the previous linear models. Due to microscale nature of the system, excitation amplitude plays an important role since even a small change in the amplitude of excitation can lead to significant vibrations and frequency shift. (c) 2007 Elsevier Ltd. All rights reserved.