Strain and in-plane orientation effects on the ferroelectricity of (111)-oriented tetragonal Pb(Zr0.35Ti0.65)O3 thin films prepared by metal organic chemical vapor deposition

The growth and characterization of epitaxial (111)-oriented Pb(Zr0.35Ti0.65)O-3 films deposited by metal organic chemical vapor deposition on (100)-oriented silicon substrates [(111)SrRuO3 parallel to(111)Pt parallel to(100)yttria-stabilized zirconia parallel to(100)Si] are reported. The orientation, microstructure, and electric properties of these films are compared to those of fiber-textured highly (111)-oriented lead zirconate titanate (PZT) films deposited on (111)SrRuO3/(111)Pt/TiOx/SiO2/(100)Si substrates and epitaxial (111)-oriented PZT films deposited on (111)SrRuO3 parallel to(111)SrTiO3 substrates. The ferroelectric properties of these films are not drastically influenced by the in-plane orientation of the film and by the strain state imposed by the underlying substrate. These results support the use of fiber-textured highly (111)-oriented films in highly stable ferroelectric capacitors. (C) 2007 American Institute of Physics.