期刊
APPLIED SURFACE SCIENCE
卷 253, 期 15, 页码 6539-6544出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2007.01.097
关键词
dielectric breakdown; femtosecond laser micofabrication; micro-explosion; sapphire
The actual space-time dependent intensity distribution of a tightly focused (numerical aperture NA = 1.35) Gaussian femtosecond pulse is modeled inside dielectric material. Such focusing is typically used for recording with sub-wavelength resolution inside dielectrics. The multi-pulse structuring inside the bulk and on the surface of sapphire are demonstrated. Formation of nano-cracks and nano-crystals is revealed inside the crystalline sapphire. Ripple formation on the surface is discussed in terms of the efficacy map calculated by theory given in ref. [J.E. Sipe, IF Young, J.S. Preston, H.M. van Driel, Laser-induced periodic surface structure. I. Theory, Phys. Rev. B 27 (2) (1983) 1141-1154.]. (C) 2007 Published by Elsevier B.V.
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