Spatial resolution assessment of Nano-SQUIDs made by focused ion beam

The ability to reduce SQUID dimensions into the submicrometer or nanometer regime points the way towards novel applications, particularly in emerging fields such as quantum information processing, single-photon/particle detection, and experimental studies of nano-scale entities such as Bose-Einstein condensates. We report here on our ongoing work combining traditional thin-film and photolithographic fabrication processes with computer-aided-design software and focused ion beam milling to realize sub-micrometer superconducting structures. Their magnetic field sensitivity, noise behavior, spatial resolution, and prospects for magnetic spin detection are discussed.