Testing of a Micro Faraday Cup Array for Ion Detection in SIMS

A micro-Faraday array detector (row of miniature 32 thin film strip electrodes wire bonded to an on-chip integrated capacitance transimpedance amplifier) was tested for use in a multiple collector secondary ion mass spectrometry. The detector was mounted on a standard IMS3f SIMS instrument in place of a microchannel plate. The measurements were performed by using a silicon sample bombarded by either [image omitted] or Cs+ primary ions with or without D2O flooding and detecting secondary ions of Si +/-, SiH +/-, O-, SiD-, OD-. A parallel detection of near masses of 29Si and 28SiH or 18O and 16OD was demonstrated at a sensitivity level 230 counts/s.