4.7 Article

Effect of annealing time on morphological characteristics of Ba(Zr,Ti)O3 thin films

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JOURNAL OF ALLOYS AND COMPOUNDS
卷 437, 期 1-2, 页码 269-273

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ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2006.07.100

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annealing time; microstructure; thin films; BZT

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Ba(Zr0.50Ti0.50)O-3 thin films were prepared by the polymeric precursor method using the annealing low temperature of 300 degrees C for 8, 16, 24, 48, 96 and 192 It in a furnace tube with oxygen atmosphere. The X-ray diffraction patterns revealed that the film annealed for 192 h presented some crystallographic planes (1 0 0), (1 1 0) and (2 0 0) in its crystalline lattice. Fourier transformed infrared presented the formation of metal-oxygen stretching at around 756 cm(-1). The atomic force microscopy analysis presented the growth of granules in the Ba(Zr0.50Ti0.50)O-3 films annealed from 8 to 96 h. The crystalline film annealed for 192 h already presents grains in its perovskite structure. It evidenced a reduction in the thickness of the thin films with the increase of the annealing time. (C) 2006 Elsevier B.V. All rights reserved.

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