期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
卷 46, 期 7B, 页码 4754-4759出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.46.4754
关键词
surface acoustic wave (SAW); SAW streaming; atomization; thin film deposition
When a Rayleigh surface acoustic wave (SAW) propagates at a liquid/solid interface, it radiates its energy into the adjacent liquid. If a liquid droplet is loaded on the SAW propagation surface, droplet vibration, streaming, jetting, and atomization are observed. These phenomena are called SAW streaming. In this paper, a novel thin-film deposition method based on the atomization of SAW streaming phenomena is proposed. The liquid with film material is loaded on the SAW propagation surface and the liquid is atomized. The atomization direction depends on the Rayleigh angle, which is determined by the sound velocity in the liquid and the SAW velocity. For easy fabrication of a thin uniform film, the atomization direction is controlled in the perpendicular direction. Using the developed system, the deposition of pigments in ink is carried out. The results observed by scanning electron microscopy (SEM) and atomic force microscopy (AFM) indicate that a pigment layer is formed on a glass plate.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据