Lithography by Scanning Electrochemical Microscopy with a Multiscaled Electrode

A multiscaled electrochemical probe is presented for Scanning Electrochemical Microscopy (SECM) experiments. It is fabricated by wet chemical etching followed by sputter-coating of an ordered optical fiber bundle. Owing to the optical fiber bundle preparation, the global electrode may present different shapes. After the chemical etching step, each one of these shapes is conserved and finally decorated with 6000 nanotips. Numerical simulations and approach curves are used to study the probe properties and the influence of the global shape and of the nanotips. The numerical simulations show that the approach curves do not depend on the shape of the electrode but rather on the total height of the protuberance of its electroactive part. Such new SECM probes are then used to pattern a Teflon surface. Indeed, by controlling the time scale of the applied potential pulses, the thickness of the reaction layer is confined at each nanotip, and the nanotip pattern is electrochemically transferred onto the non-conductive surface. Both scales (i.e., global electrode shape and nanotip array) thus show distinct and complementary features for positioning the probe and for the subsequent electrochemical patterning.