Reconstruction of thickness and composition of stratified materials by means of 3D micro X-ray fluorescence spectroscopy

The recently developed 31) micro X-ray fluorescence spectroscopy (3D Micro-XRF) enables three-dimensional resolved, nondestructive investigation of elemental distribution in samples in the micrometer regime. Establishing a reliable quantification procedure is the precondition to render this spectroscopic method into a true analytical tool. One prominent field of application is the investigation of stratified material. A procedure for the quantitative reconstruction of the composition of stratified material by means of 3D Micro-XRF is proposed and validated. With the procedure, it is now possible to determine nondestructively the chemical composition and the thickness of layers. As no adequate stratified reference samples were available for validation, stratified reference material has been developed that is appropriate for 3D Micro-XRF or other depth-sensitive X-ray techniques.