Structural and magnetic properties of Mn-ion implanted ZnO films

Zinc oxide films doped with Mn (Mn:ZnO) were prepared by implanting Mn+ ions into ZnO films deposited by pulsed laser deposition, and their structure and magnetic properties were studied. The Raman spectra of the films indicated that Mn ions occupied the Zn site of ZnO after annealing, while the as-implanted films were amorphous like the ones with very low crystallinity. Magnetic measurements revealed that neither as-implanted nor annealed Mn:ZnO films showed ferromagnetism. The Mn:ZnO films demonstrated paramagnetism that was likely due to Mn2+ ions at the substitutional Zn site.