期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 78, 期 7, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.2755779
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We investigate the stresses in thin films with sub-millimeter lateral spatial resolution using a dense array of prefabricated cantilever beams prepared by microelectromechanical-system techniques. Stress induced deflection of the cantilever is interrogated by an optical (laser/position sensitive detector) measurement system. Composition spread films are deposited on the cantilever array using a three gun on-axis magnetron cosputtering system. The position dependent composition is inferred using rate calibrations and verified by electron microprobe/energy dispersive spectroscopy. We demonstrate the function of this system using an Fe-Ni-Al composition spread with similar to 1 at. % resolution. This approach allows for measurement of the composition dependence of other electromechanical properties such as the martensitic phase transition temperature of traditional and ferromagnetic shape-memory alloys, as well as the properties of hydrogen storage materials and the magnetic response of magnetostrictive materials. (c) 2007 American Institute of Physics.
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