期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 138, 期 1, 页码 145-150出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2007.04.003
关键词
magnetically actuated micromirror; magnetic sensor; magnetic field measurement; non-destructive evaluation
Magnetically actuated micromirrors have been developed for high sensitivity magnetic field measurement. Computer modelling was carried out to determine the micromirror structure at low field actuation. A novel SOI wafer process was established for micromirror fabrication. The process offers stress-free micromechanical structures without the stiction problem encountered in conventional surface micromachining process. By using two-step etching, the thickness of suspension beams of a micromirror can be independently defined. The new process also made it possible to electroplate a permalloy layer on one side of a micromirror and to maintain a mirror like reflection surface on the other side. The magnetically actuated micromirrors have been characterised using a simple laser beam reflection and CCD camera recording system. The measurement results have confirmed the computer modelling. Magnetic field detection sensitivity of about 1 degrees of mirror deflection per 10(-4) T of field intensity has been achieved. (c) 2007 Elsevier B.V. All rights reserved.
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