期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 138, 期 1, 页码 87-96出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2007.05.001
关键词
flow sensor; thermal sensor; flexible sensor; polyimide film; radially asymmetric flow condition
We investigated the ability of an on-wall in-tube flexible thermal flow sensor to measure the flow rate under a radially asymmetric flow condition in a curved tube. The sensor was fabricated on a polyimide film substrate using polymer MEMS technologies. A ring-shaped sensing structure was formed by mounting the sensor on the inner-wall surface of a straight tube that follows a curved tube. The sensor characteristics were experimentally evaluated by varying the distance L from the end of the curved tube, the curvature angle theta, and the curvature radius r of the curved tube. The output signals from the sensor were the same when the distance L was over 5 mm at various curvature angles and curvature radiuses. The sensor is thus well suited for measuring the flow rate in spiral tubes. (c) 2007 Elsevier B.V. All rights reserved.
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