Powerful 170-attosecond XUV pulses generated with few-cycle laser pulses and broadband multilayer optics

Single 170-as extreme ultraviolet (XUV) pulses delivering more than 106 photons/pulse at similar to 100 eV at a repetition rate of 3 kHz are produced by ionizing neon with waveform-controlled sub-5 fs near-infrared (NIR) laser pulses and spectrally filtering the emerging near-cutoff high-harmonic continuum with a broadband, chirped multilayer molybdenum-silicon (Mo/Si) mirror.