期刊
ULTRAMICROSCOPY
卷 107, 期 8, 页码 575-586出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.ultramic.2006.11.005
关键词
EELS; TEM; radiation effects; Fourier optics; electron scattering
类别
We discuss various factors that determine the performance of electron energy-loss spectroscopy (EELS) and energy-filtered (EFTEM) imaging in a transmission electron microscope. Some of these factors are instrumental and have undergone substantial improvement in recent years, including the development of electron monochromators and aberration correctors. Others, such as radiation damage, delocalization of inelastic scattering and beam broadening in the specimen, derive from basic physics and are likely to remain as limitations. To aid the experimentalist, analytical expressions are given for beam broadening, delocalization length, energy broadening due to core-hole and excited-electron lifetimes, and for the momentum resolution in angle-resolved EELS. (C) 2007 Elsevier B.V. All rights reserved.
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