Silicon nanowires (SiNWs) modified by palladium (Pd) nanoparticles were investigated for hydrogen detection. SiNWs were fabricated via a thermal evaporation method using tin (Sn) as the catalyst. The as-grown SiNWs were chemically treated to remove surface oxide and then coated with a thin layer of Pd nanoparticles. A gas sensor device was fabricated with the Pd-functionalized SiNWs. The sensor showed better sensitivity to hydrogen and faster responding time than the macroscopic Pd wire hydrogen sensor.
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